Plasma chemical processing

Plasma chemical processing

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Schematic of discharge circuit. During the ... Voltage and current waveforms were monitored with Tektronix P6015 high-voltage probes and a Pearson model 4100 current probe. Waveforms were displayed with a Tektronix 465 oscilloscope.

Title:Plasma chemical processing
Author: David M. Benenson, Emil Pfender
Publisher:Amer Inst of Chemical Engineers - 1979-12-01

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